ES is used as the loader for supplying work to the automatic lathe. Low cost device confi guration is possible.
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KRF is used in the changer unit in a two-tiered confi guration. Unit is more compact and features higher rigidity than conventional articulated robots. |
The USW is used in the unit that transports the liquid crystal glass. Because this operation entails a long stroke and a triple axis, a lightweight, high-rigidity USW, equipped with an aluminum base, is employed. |