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Top Page > Miniature LM Guide AHR for High Acceleration to Increase Production Capacity in Semiconductor Manufacturing

Miniature LM Guide AHR for High Acceleration to Increase Production Capacity in Semiconductor Manufacturing

With the model AHR, THK offers a new miniature guide featuring four circular arc grooves and two-point contact of the balls, which ensures smooth running with low sliding resistance.


Miniaturführung für hohe Beschleunigungsfähigkeit

Illustration 1: Miniature LM Guide AHR for High Accelerations

Newly developed ball circuits with reinforced and more durable components enable high-speed operation of up to 5 m/s with a maximum acceleration of up to 300 m/s². This innovation meets the growing demand for higher productivity in semiconductor manufacturing.


Low Running Resistance Due to Guide Carriage with Four Circular Arc Grooves and Two-Point Contact

Illustration 2: Low Running Resistance Due to Guide Carriage with Four Circular Arc Grooves and Two-Point Contact



The four-row type AHR is dimensionally compatible with commercially available two-row miniature guides with Gothic arch grooves. Standard sizes 9, 12, and 15 are available, each with three different carriage types: standard block, flanged block, and short block. For further information, please visit THK's website.

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