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Miniature LM Guide AHR for High Acceleration to Increase Production Capacity in Semiconductor Manufacturing

With the model AHR, THK offers a new miniature guide featuring four circular arc grooves and two-point contact of the balls, which ensures smooth running with low sliding resistance.


Miniature LM Guide AHR for High Accelerations

Illustration 1: Miniature LM Guide AHR for High Accelerations

Newly developed ball circuits with reinforced and more durable components enable high-speed operation of up to 5 m/s with a maximum acceleration of up to 300 m/s². This innovation meets the growing demand for higher productivity in semiconductor manufacturing.


Low Running Resistance Due to Guide Carriage with Four Circular Arc Grooves and Two-Point Contact

Illustration 2: Low Running Resistance Due to Guide Carriage with Four Circular Arc Grooves and Two-Point Contact



The four-row type AHR is dimensionally compatible with commercially available two-row miniature guides with Gothic arch grooves. Standard sizes 9, 12, and 15 are available, each with three different carriage types: standard block, flanged block, and short block. For further information, please visit THK's website.

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